Contact
Johan Liu
johan.liu@chalmers.se
Chalmers University of Technology, located in Göteborg, Sweden, is one of the leading European universities in Engineering Science and technology. The Department of Microtechnology and Nanoscience (MC2) is doing research and education with focus on future electronics, photonics, bio- and nanosystems from device level to system integration. MC2 houses a cleanroom for micro- and nanofabrication with the latest 300 advanced equipment. Our work is often done in close collaboration with Swedish and international partners within academy, industry and society. With a unique research competence, we offer education on undergraduate and graduate level and within our international masters programmes. The Electronics Materials and Packaging group focuses on development of new nano-scale materials and processes for electronics, microsystems and biomedical applications. The goal of the research is to contribute in development of technological platforms for heterogeneous integration in future beyond CMOS electronics systems.
The group has during the last five years published over 40 papers on the topic of integration and interconnects in high-impact journals, such as Nature Communications, Scientific Reports, Advanced Materials, Advanced Functional Materials, Small, Carbon, Journal of Materials Chemistry, Glia, Journal of Nanomedicine, Langmuir, Journal of Composite Science and Technology, Applied Physics Letters, Nanotechnology, and IEEE Electron Device Letters and IEEE CPMT Transactions.
Resources:
MC2 at Chalmers houses the Nanofabrication Laboratory, a world-class university cleanroom for research and fabrication of micro and nanotechnology. The Laboratory is a state-of-the-art facility with 1240 m2 of cleanroom classified area with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nano technology. The Laboratory is also a member of μ- Fab, the Swedish micro and nano fabrication network supported by The Swedish research council, SSF, Vinnova and Knut and Alice Wallenberg Foundation. This gives access to a larger infrastructure through the Microstructure Laboratory at Uppsala University and the Electrum Laboratory at KTH in Stockholm. MC2’s two strategic focus areas have recently resulted in the launch of two processing lines in the Laboratory to complement the flexible processing and materials environment. The lines increase the quality, throughput,
and stability of the microwave & nano/quantum devices and components fabricated in the Laboratory. More than 200 processing and characterization tools are accessible in the laboratory, covering the fields such as electron beam lithography, thin film deposition, plasma processing, thermal processing, MBE of III-V materials, and advanced characterization. The equipments at the Bio-, Electronics Materials and Packaging Group include a complete surface mount line with a flip chip bonder and characterization tools, such as mechanical testers, TGA, DMA, DSC, thermal cycling chamber, etc. The group also owns a TCVD/PECVD CNT growth system installed in the nanofabrication lab.
Role in NanoSmart:
Chalmers will mainly work on the following tasks:
Development and fabrication of the through oxide vias filled by CNT-Cu composite.
Electrical characterization and microstructure analysis of CNT-Cu TOVs.
Key personnel:
Prof. Johan Liu (male) is the head of the Center for Swedish Microsystem Integration Technology Center and Electronics Materials and Systems Laboratory at the Department of Microtechnology and Nanoscience, Chalmers University of Technology, Göteborg, Sweden. As a fellow of IEEE and member of the Swedish Royal Academy of Engineering Sciences (IVA) he has published over 490 papers in journals, proceedings and book chapters and 2 books in the field of electronics packaging technology and materials. He has over to 60 patents accepted or filed and has given about 55 key note/invited talks during the last 20 years in the field of electronics packaging. His H-index is 29/39 according to WoS/Google Scholar and has received 3300 and 5960 citations according to WoS and Google Scholar respectively.
Dr. Majid Kabiri Samani (male) received his Ph D from Nanyang Tecnhological University of Singapore in Microelectronics and the area of thermal management and thermal characterization of carbon nanostructures in 2015. Since then he is a postdoc researcher at Chalmers University of Technology, Sweden responsible for transient thermal characterization technology development for thin film structures.
Andreas Nylander (male) received his M.S degree from Chalmers University of Technology and Right now, he is studying Ph.D. in Chalmers in the field of micro packaging, 3D interconnect, carbon nanotube interconnect and thermal management in 3D IC packaging.